2009-2010 University Catalog 
  
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2009-2010 University Catalog

ECE 437 - Principles of Microelectronic Device Fabrication

Credits: 3
Introduces fundamentals of microelectronic semiconductor device fabrication technology. Processing steps include photolithography, oxidation, diffusion, ionimplantation, chemical vapor deposition, ohmic contact metalization, interconnects, packaging, MOS process integration, and bipolar process integration. Laboratory project integral to course.

Prerequisites
ECE 333 or 430, or permission of instructor.

Hours of Lecture or Seminar per week
2
Hours of Lab or Studio per week
3