2011-2012 University Catalog 
  
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2011-2012 University Catalog

ECE 689 - VLSI Processing

Credits: 3 (NR)
In-depth study of various steps in silicon VLSI circuit processing. Includes thermal oxidation, diffusion, ion implantation, epitaxial growth, polysilicon, metal and insulator layer deposition, photolithography, and MOS processing integration. Involves hands-on laboratory projects and using process simulator SUPREM.

Prerequisite(s): ECE 584 or permission of instructor.

Hours of Lecture or Seminar per week: 3
Hours of Lab or Studio per week: 0